Introduction to microelectronic Fabrication / (Record no. 182248)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01048 a2200229 4500 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | Nust |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20221201151817.0 |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
| LC control number | 2002276015 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0201146959 |
| 040 ## - CATALOGING SOURCE | |
| Transcribing agency | Nust |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152,JAE |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Jaeger, Richard C. |
| 9 (RLIN) | 55586 |
| 245 10 - TITLE STATEMENT | |
| Title | Introduction to microelectronic Fabrication / |
| Statement of responsibility, etc. | Richard C. Jaeger. |
| 250 ## - EDITION STATEMENT | |
| Remainder of edition statement | vol 5 |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Upper Saddle River, N.J. : |
| Name of publisher, distributor, etc. | Prentice Hall, |
| Date of publication, distribution, etc. | c2002. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xiv,232 p. : |
| Other physical details | ill. ; |
| Dimensions | 24 cm. |
| 490 1# - SERIES STATEMENT | |
| Series statement | Modular series on solid state devices ; |
| Volume/sequential designation | v. 5 |
| 505 ## - FORMATTED CONTENTS NOTE | |
| Formatted contents note | An Overview of Microelectronic Fabrication (Page-1), Lithography (Page-13), Thermal Oxidation of Silicon (Page-29), Diffusion (Page-49), Ion Implantations (Page-89), Film Deposition (Page-107), Interconnections and Contacts (Page-133), Packing and Yield (Page-153), MOS Process Integration (Page-173), Bipolar Process Integration (Page-201). |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Telecommunication Engineering |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE | |
| Uniform title | Modular series on solid state devices (Upper Saddle River, N.J.) ; |
| 9 (RLIN) | 55588 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | |
| Koha item type | Book |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Permanent Location | Current Location | Shelving location | Date acquired | Full call number | Barcode | Date last seen | Price effective from | Koha item type | Public note |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Military College of Signals (MCS) | Military College of Signals (MCS) | General Stacks | 12/12/2016 | 621.38152,JAE | MCS575 | 12/08/2016 | 12/12/2016 | Book | Almirah No.33, Shelf No.5 |