| 000 -LEADER |
|---|
| fixed length control field |
01368 a2200229 4500 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
Nust |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20230317113523.0 |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
|---|
| LC control number |
88015503 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9024737338 |
| 040 ## - CATALOGING SOURCE |
|---|
| Transcribing agency |
Nust |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.395,EME |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Emerging technologies for in situ processing / |
| Statement of responsibility, etc. |
edited by Daniel J. Ehrlich and Van Tran Nguyen. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Dordrecht ; |
| -- |
Boston : |
| Name of publisher, distributor, etc. |
M. Nijhoff ; |
| Place of publication, distribution, etc. |
Norwell, MA, USA : |
| Name of publisher, distributor, etc. |
Distributors for the U.S. and Canada, Kluwer Academic Publishers, |
| Date of publication, distribution, etc. |
1988. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
x, 290 p. : |
| Other physical details |
ill. ; |
| Dimensions |
25 cm. |
| 440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
NATO ASI series. |
| Number of part/section of a work |
Series E, |
| Volume/sequential designation |
no. 139 |
| 9 (RLIN) |
104591 |
| 505 ## - FORMATTED CONTENTS NOTE |
|---|
| Formatted contents note |
In-Situ processing combining MBE (Page-1), Motivations and early demonstration for In-Situ processing (Page-13), Laser eching and microelectronic applications (Page-23), Laser induced chemical processing of materials (Page-33), High technology manufacturing (Page-45), Ultra high vaccum processing (Page-55), Expitaxial growth of III-V materials (Page-61), Ion lithgraphy projection (Page-113), Direct writing of silicon conductors (Page-265), Subject index (Page-289). |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuits |
| General subdivision |
Very large scale integration |
| -- |
Design and construction |
| -- |
Congresses. |
| 9 (RLIN) |
110510 |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Ehrlich, Daniel J. |
| 9 (RLIN) |
110511 |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Nguyen, Van Tran. |
| 9 (RLIN) |
110512 |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
North Atlantic Treaty Organization. |
| Subordinate unit |
Scientific Affairs Division. |
| 9 (RLIN) |
95775 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Book |
| Source of classification or shelving scheme |
|
