Microlithography science and technology (Record no. 585698)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00451nam a22001817a 4500 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | CEME |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20210628210741.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 210106b xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780824790240 |
| 040 ## - CATALOGING SOURCE | |
| Transcribing agency | . |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381531 SUZ |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Suzuki, Kazuaki, Smith, Bruce W |
| 9 (RLIN) | 80838 |
| 245 ## - TITLE STATEMENT | |
| Title | Microlithography science and technology |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2ND |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | LONDON |
| Name of publisher, distributor, etc. | CRC PRESS |
| Date of publication, distribution, etc. | 2007 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 835P |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Book |
| Source of classification or shelving scheme | |
| Withdrawn status | Lost status | Damaged status | Not for loan | Permanent Location | Current Location | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| College of Electrical & Mechanical Engineering (CEME) | College of Electrical & Mechanical Engineering (CEME) | General Stacks | 03/10/2017 | 621.381531 SUZ | CEME-47389 | 06/28/2021 | 06/28/2021 | Book | |||||
| College of Electrical & Mechanical Engineering (CEME) | College of Electrical & Mechanical Engineering (CEME) | General Stacks | 03/10/2017 | 621.381531 SUZ | CEME-47390 | 06/28/2021 | 06/28/2021 | Book | |||||
| College of Electrical & Mechanical Engineering (CEME) | College of Electrical & Mechanical Engineering (CEME) | General Stacks | 03/10/2017 | 621.381531 SUZ | CEME-47391 | 06/28/2021 | 06/28/2021 | Book |