Semiconductor silicon crystal technology / Fumio Shimura.
Publisher: San Diego : Academic Press, c1989Description: viii, 426 p. : ill. ; 24 cmISBN: 0126400458 (alk. paper)Subject(s): Telecommunication EngineeringDDC classification: 621.38152,SHI
Contents:
Introduction (Page-1), Basic Crystallography (Page-22), Basic Semiconductor Physics (Page-82), Silicon Crystal Growth and Wafer Preparation (Page-114), Crystal Characterization (Page-215), Grown in and Process-Induced Defects (Page-279), Silicon Wafer Criteria for VLSI/ ULSI Technology (Page-378).
| Item type | Current location | Home library | Shelving location | Call number | URL | Status | Notes | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|---|---|---|
Book
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Military College of Signals (MCS) | Military College of Signals (MCS) | General Stacks | 621.38152,SHI (Browse shelf) | Link to resource | Available | Almirah No.33, Shelf No.6 | MCS770 |
Total holds: 0
Introduction (Page-1), Basic Crystallography (Page-22), Basic Semiconductor Physics (Page-82), Silicon Crystal Growth and Wafer Preparation (Page-114), Crystal Characterization (Page-215), Grown in and Process-Induced Defects (Page-279), Silicon Wafer Criteria for VLSI/ ULSI Technology (Page-378).
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