VLSI fabrication principles : silicon and gallium arsenide / Sorab K. Ghandhi.

By: Ghandhi, Sorab KhushroPublisher: New York : Wiley, c1983Description: xi, 665 p. : ill. ; 24 cmISBN: 0471868337 :Subject(s): Gallium arsenide | Silicon | Telecommunication EngineeringDDC classification: 621.38171,GHA Online resources: Publisher description | Table of contents only
Contents:
Material Properties (Page-1), Phase Diagrams and Solid Solubility (Page-49), Crystal Growth and Doping (Page-81), Diffusion (Page-111), Epitaxy (Page-213), Ion Implantation (Page-299), Native Oxide Films (Page-371), Deposits Films (Page-419), Etching and Cleaning (Page-475), Lithographic Processes (Page-533), Device and Circuits Fabrication (Page-567), The Mathematics of Diffusion (Page-639).
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Item type Current location Home library Shelving location Call number URL Status Notes Date due Barcode Item holds
Book Book Military College of Signals (MCS)
Military College of Signals (MCS)
General Stacks 621.38152,GHA (Browse shelf) Link to resource Available Almirah No.33, Shelf No.5 MCS562
Book Book Military College of Signals (MCS)
Military College of Signals (MCS)
General Stacks 621.38152,GHA (Browse shelf) Link to resource Available Almirah No.33, Shelf No.5 MCS563
Total holds: 0

Material Properties (Page-1), Phase Diagrams and Solid Solubility (Page-49), Crystal Growth and Doping (Page-81), Diffusion (Page-111), Epitaxy (Page-213), Ion Implantation (Page-299), Native Oxide Films (Page-371), Deposits Films (Page-419), Etching and Cleaning (Page-475), Lithographic Processes (Page-533), Device and Circuits Fabrication (Page-567), The Mathematics of Diffusion (Page-639).

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