Polycrystalline silicon for integrated circuit applications / Ted Kamins.

By: Kamins, Theodore ISeries: Kluwer international series in engineering and computer science ; SECS 45Publisher: Boston : Kluwer Academic Publishers, c1988Description: xii, 290 p. : ill. ; 24 cmISBN: 0898382599Subject(s): Telecommunication EngineeringDDC classification: 621.38171,KAM
Contents:
Deposition (Page-1), Structure (Page-41), Dopant Diffusion and Segregation (Page-61), Oxidation (Page-125), Electrical Properties (Page-155), Applications (Page-203).
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Item type Current location Home library Shelving location Call number URL Status Notes Date due Barcode Item holds
Book Book Military College of Signals (MCS)
Military College of Signals (MCS)
General Stacks 621.38171,KAM (Browse shelf) Link to resource Available Almirah No.34, Shelf No.6 MCS21366
Book Book Military College of Signals (MCS)
Military College of Signals (MCS)
General Stacks 621.38171,KAM (Browse shelf) Link to resource Available Almirah No.34, Shelf No.6 MCS21368
Total holds: 0

Deposition (Page-1), Structure (Page-41), Dopant Diffusion and Segregation (Page-61), Oxidation (Page-125), Electrical Properties (Page-155), Applications (Page-203).

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