The science and engineering of microelectronic fabrication

By: Campbell, Stephen AMaterial type: TextTextPublisher: NEW YORK OXFORD UNIVERSITY PRESS 2001Description: XIV,604PISBN: 0-19-513605-5Subject(s): SEMICONDUTOR-DESIGN AND CONSTRUCTION MICROELECTRONIC FABRICATIONDDC classification: 621.38152 CAM
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Item type Current location Home library Shelving location Call number Status Date due Barcode Item holds
Book Book College of Electrical & Mechanical Engineering (CEME)
College of Electrical & Mechanical Engineering (CEME)
General Stacks 621.38152 CAM (Browse shelf) Available CEME-35512
Total holds: 0

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