TH-SOF-1852-Design of Capacitive Micro-Electro-Mechanical-Systems (MEMS) Accelerometer, Considering Residual Stress, Temperature Variations and Thermoelastic Damping

By: Muhammad Ahmad Raza Tahir | Supervisor Dr. Muhammad Mubasher SaleemMaterial type: TextTextPublisher: ISLAMABAD: NUST COLLEGE OF EME, 2021Subject(s): MS-MTS-18DDC classification: 200 THE
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