MEMS : applications  
Mohamed Gad-el-Hak. 
 - 2nd ed. 
 - Boca Raton, FL :  CRC Press/Taylor & Francis,  2006. 
 - 1 v. (various pagings) :  ill. ;  26 cm. 
 - Mechanical engineering series The MEMS handbook .
 - Mechanical engineering series (Boca Raton, Fla.) .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780849391392 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Detectors.<br/>Microactuators.<br/>Robots.
<br/><br/><label>Dewey Class. No.: </label>621.381