MEMS : introduction and fundamentals edited by Mohamed Gad-El-Hak. - 2nd ed. - Boca Raton : CRC/Taylor & Francis, 2006. - 1 v. (various pagings) : ill. ; 26 cm. - Mechanical engineering series The MEMS handbook . - Mechanical engineering series (Boca Raton, Fla.) .

Includes bibliographical references and index.

9780849391378


Microelectromechanical systems.
Microelectronics.
Nanotechnology.

621.381