MEMS : introduction and fundamentals
edited by Mohamed Gad-El-Hak.
- 2nd ed.
- Boca Raton : CRC/Taylor & Francis, 2006.
- 1 v. (various pagings) : ill. ; 26 cm.
- Mechanical engineering series The MEMS handbook .
- Mechanical engineering series (Boca Raton, Fla.) .
Includes bibliographical references and index.
9780849391378
Microelectromechanical systems.
Microelectronics.
Nanotechnology.
621.381