TY  - GEN
AU  - Beeby,Stephen
TI  - MEMS mechanical sensors
T2  - Artech House microelectromechanical system series
SN  - 1580535364
U1  - 681.2,BEE 
PY  - 2004///
CY  - Boston
PB  - Artech House
KW  - Detectors
KW  - Microelectromechanical systems
N1  - Introduction (Page-1), Materials and fabrication techniques(Page-7),  MEMS simulation and design tools (Page-39), Mechanical sensor packaging (Page-57), Mechanical transduction techniques (Page-85), Pressure sensors (Page-113), Force and torque sensors (Page-153), Inertial sensors (Page-173), Flow sensors (Page-213)
UR  - http://www.loc.gov/catdir/toc/fy0611/2004046158.html
ER  -