TY  - GEN
AU  - May,Gary S.
AU  - Sze,S.M.
TI  - Fundamentals of semiconductor fabrication
SN  - 0471232793
U1  - 621.381,MAY 
PY  - 2004///
CY  - New York
PB  - Wiley
KW  - Semiconductors
KW  - Design and construction
KW  - Telecommunication Engineering
N1  - Introduction (Page-1), Crystal Growth (Page-17), Silicon Oxidation (Page-41), Photolithography (Page-60), Etching (Page-85), Diffusion (Page-105), ION Implantation (Page-124), Film Deposition (Page-144), Process Integration (Page-182), IC Manufacturing (Page-226), Further Trends and Challenges (Page-259).
UR  - http://www.loc.gov/catdir/bios/wiley044/2003276248.html
UR  - http://www.loc.gov/catdir/description/wiley037/2003276248.html
UR  - http://www.loc.gov/catdir/toc/wiley032/2003276248.html
ER  -