Jaeger, Richard C. <br/><br/>
Introduction to microelectronic Fabrication / 
Richard C. Jaeger. 
 -  vol 5 
 - Upper Saddle River, N.J. :  Prentice Hall,  c2002. 
 - xiv,232 p. :  ill. ;  24 cm. 
 - Modular series on solid state devices ;  v. 5 .
 - Modular series on solid state devices (Upper Saddle River, N.J.) ; .
<br/><br/>An Overview of Microelectronic Fabrication (Page-1), Lithography (Page-13), Thermal Oxidation of Silicon (Page-29), Diffusion (Page-49), Ion Implantations (Page-89), Film Deposition (Page-107), Interconnections and Contacts (Page-133), Packing and Yield (Page-153), MOS Process Integration (Page-173), Bipolar Process Integration (Page-201). 
<br/><br/><label>ISBN: </label>0201146959 
<br/><br/><label>LCCN: </label>2002276015 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Telecommunication Engineering
<br/><br/><label>Dewey Class. No.: </label>621.38152,JAE