TY  - GEN
AU  - Jaeger,Richard C.
TI  - Introduction to microelectronic Fabrication
T2  - Modular series on solid state devices
SN  - 0201146959
U1  - 621.38152,JAE 
PY  - 2002///
CY  - Upper Saddle River, N.J.
PB  - Prentice Hall
KW  - Telecommunication Engineering
N1  - An Overview of Microelectronic Fabrication (Page-1), Lithography (Page-13), Thermal Oxidation of Silicon (Page-29), Diffusion (Page-49), Ion Implantations (Page-89), Film Deposition (Page-107), Interconnections and Contacts (Page-133), Packing and Yield (Page-153), MOS Process Integration (Page-173), Bipolar Process Integration (Page-201)
ER  -