Electronic materials science : for integrated circuits in Si and GaAs /
James W. Mayer, S.S. Lau.
- New York : London : Macmillan ; Collier Macmillan, c1990.
- xx, 476 p. : ill. ; 25 cm.
Integrated Circuits (Page -1), Current Flow and Capacitance (Page -27), Bands Bonds and Semiconductors (Page -51), Barriers and Junctions (Page -82), Transistors: Bipolar and Field Effect (Page -111), Crystallography and Crystalline Defects (Page -142), Diffusion in Solids (Page -183) Ion Implantation (Page -222), Thermal Oxidation of Silicon and Chemical Vapor Deposition of Insulating Films (Page -251), Metallization and Phase Diagrams (Page -276), Reaction Kinetics Sillcides Aluminides and Diffusion Barriers (Page -306), Energy Band and wave Behavior (Page -340), Heterostructures Transistors and Lasers (Page -375), Heteroepitaxy (Page -403), Assembly and Packaging (Page -440).
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Integrated circuits--Design and construction. Integrated circuits--Materials. Telecommunication Engineering Transistor circuits--Materials.