Kamins, Theodore I. <br/><br/>
Polycrystalline silicon for integrated circuit applications / 
Ted Kamins. 
 - Boston :  Kluwer Academic Publishers,  c1988. 
 - xii, 290 p. :  ill. ;  24 cm. 
 - Kluwer international series in engineering and computer science ;  SECS 45 .
<br/><br/>Deposition (Page-1), Structure (Page-41), Dopant Diffusion and Segregation (Page-61), Oxidation (Page-125), Electrical Properties (Page-155), Applications (Page-203). 
<br/><br/><label>ISBN: </label>0898382599 
<br/><br/><label>LCCN: </label>87033436 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Telecommunication Engineering.
<br/><br/><label>Dewey Class. No.: </label>621.38171,KAM