TY  - GEN
AU  - Ehrlich,Daniel J.
AU  - Nguyen,Van Tran
ED  - North Atlantic Treaty Organization.
TI  - Emerging technologies for in situ processing
SN  - 9024737338
U1  - 621.395,EME 
PY  - 1988///
CY  - Dordrecht, Boston, Norwell, MA, USA
PB  - M. Nijhoff, Distributors for the U.S. and Canada, Kluwer Academic Publishers
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Design and construction
KW  - Congresses
N1  - In-Situ processing combining MBE (Page-1), Motivations and early demonstration for In-Situ processing (Page-13), Laser eching and microelectronic applications (Page-23), Laser induced chemical processing of materials (Page-33), High technology manufacturing (Page-45), Ultra high vaccum processing (Page-55), Expitaxial growth of III-V materials (Page-61), Ion lithgraphy  projection (Page-113), Direct writing of silicon conductors (Page-265), Subject index (Page-289)
ER  -