Makabe, T. <br/><br/>
Plasma electronics :  applications in microelectronic device fabrication / 
T. Makabe, Z. Petrovic. 
 - [S.l.] :  Taylor & Francis,  2006. 
 - 360 p. ;  16 cm. 
 - Series in plasma physics. .
 - Series in plasma physics. .
<br/><br/><label>ISBN: </label>0750309768 9780750309769 
<br/><br/><label>Dewey Class. No.: </label>620.044