TY  - BOOK
AU  - Liu,Ai-Qun
AU  - Yu,Aibin
TI  - RF MEMS switching and integrated switching circuits: design, fabrication and test 
T2  - MEMS reference shelf
SN  - 9780387462615 (alk. paper)
AV  - TK7875 .L478 2010
U1  - 621.381537 22
PY  - 2010///
CY  - New York
PB  - Springer
KW  - Radio frequency microelectromechanical systems
KW  - Switching circuits
KW  - Integrated circuits
N1  - Includes bibliographical references and index; License restrictions may limit access
UR  - http://www.columbia.edu/cgi-bin/cul/resolve?clio8578066
ER  -