Design and manufacturing of active microsystems / 
Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach, editors. 
 - Heidelberg, [Germany] :  Springer,  c2011. 
 - Microtechnology and MEMS,  1615-8326 .
 - Microtechnology and MEMS. .
<br/><br/>Includes bibliographical references and index. 
<br/><br/> License restrictions may limit access. 
<br/><br/> HB 
<br/><br/><label>ISBN: </label>9783642129025 
 = Design and manufacturing of active microsystems 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics.<br/>Microelectromechanical systems.
<br/><br/><label>LC Class. No.: </label>TK7874  / .D4744 2011 TK7875 
<br/><br/><label>Dewey Class. No.: </label>658.5752  / DES