TY  - BOOK
AU  - Büttgenbach,S.
AU  - Burisch,Arne
AU  - Hesselbach,Jürgen
TI  - Design and manufacturing of active microsystems
T2  - Microtechnology and MEMS,
SN  - 9783642129025
AV  - TK7874 .D4744 2011
U1  - 658.5752 22
PY  - 2011///
CY  - Heidelberg, [Germany]
PB  - Springer
KW  - Microelectronics
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index; License restrictions may limit access
UR  - http://www.columbia.edu/cgi-bin/cul/resolve?clio9060006
ER  -