Electromechanical systems in microtechnology and mechatronics :  electrical, mechanical and acoustic networks, their interactions and applications / 
Arno Lenk ... [et al.]. 
 - Heidelberg ;  London :  Springer,  c2011. 
 - Microtechnology and MEMS .
 - Microtechnology and MEMS. .
<br/><br/>Includes bibliographical references (p. [453]-457) and index. 
<br/><br/> License restrictions may limit access. 
<br/><br/> hardcover 
<br/><br/><label>ISBN: </label>9783642108051 (hbk.) 
 = Electromechanical systems in microtechnology and mechatronics 
<br/><br/><label>Nat. Bib. No.: </label>GBB065998  bnb 
<br/><br/><label>Nat. Bib. Agency Control No.: </label>015563219  Uk 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mechatronics.<br/>Microelectromechanical systems--Design.
<br/><br/><label>LC Class. No.: </label>TJ163.12  / .E44 2011 TK7875 
<br/><br/><label>Dewey Class. No.: </label>621.3  / EIE