TY  - BOOK
AU  - Lenk,Arno
TI  - Electromechanical systems in microtechnology and mechatronics: electrical, mechanical and acoustic networks, their interactions and applications 
T2  - Microtechnology and MEMS
SN  - 9783642108051 (hbk.)
AV  - TJ163.12 .E44 2011
U1  - 621.3 22
PY  - 2011///
CY  - Heidelberg, London
PB  - Springer
KW  - Mechatronics
KW  - Microelectromechanical systems
KW  - Design
N1  - Includes bibliographical references (p. [453]-457) and index; License restrictions may limit access
UR  - http://www.columbia.edu/cgi-bin/cul/resolve?clio8566828
ER  -