Adams, A. Richard <br/><br/>
Introductory MEMS:  Fabrication and Applications / 
Thomas M. Adams 
 - New Delhi  Springer  2012. 
 - 444 p. ;  23cm 
<br/><br/> Paperback. 
<br/><br/> PB 
<br/><br/><label>ISBN: </label>978-81-322-0663-7 
<br/><br/><label>Dewey Class. No.: </label>621.381  / ADA