TY  - BOOK
AU  - Hari Sing Nalwa
TI  - Handbook of thin film materials: Deposition and Processing of Thin Films Vol 1, Five volume set / : Hari Singh Nalwa
SN  - 9780125129084
U1  - 621.38152 H2331 H 
PY  - 2002///
CY  - San Diegi
PB  - Academic Press
ER  -