Carl Mikael zetterling <br/><br/>
Process technology for Silicon Carbide Devices / 
Carl Mikael zetterling 
 - Sweden  KTH Royal Institute of Technology  2002 
 - 176p. 
<br/><br/><label>ISBN: </label>0-85296-998-8 
<br/><br/><label>Dewey Class. No.: </label>621.38152 P9621