Gary E.McGuire <br/><br/>
Semiconductor Materials and Process Technology Handbook 
Gary E.McGuire 
 - USA  Jaico Publishing  2008 
 - 675 p 
<br/><br/><label>ISBN: </label>978-81-7992-906-3 
<br/><br/><label>Dewey Class. No.: </label>537.6 S47111 S