Hans H. Gatzen, Volker Saile, Jurg Leuthold <br/><br/>
Micro and Nano Fabrication Tool and Processes / 
Hans H. Gatzen,  
 - New York  Springer  2015 
 - 519 
<br/><br/><label>ISBN: </label>978-3-662-44394-1 
<br/><br/><label>Dewey Class. No.: </label>670 G258M