TY  - BOOK
AU  - Pelesko,John A,Bernstein,David H
AU  - Bernstein,David H.
TI  - Modeling MEMS and NEMS
SN  - 1584883065 (alk. paper)
AV  - TK7875 .P45 2003
U1  - 621.3 21
PY  - 2003///
CY  - Boca Raton, FL
PB  - Chapman & Hall/CRC
KW  - Microelectromechanical systems
KW  - Mathematical models
N1  - Includes bibliographical references and i(p. 325-340) and index
UR  - http://www.loc.gov/catdir/enhancements/fy0646/2002031599-d.html
ER  -