Franssila, Sami. <br/><br/>
Introduction to microfabrication / 
Sami Franssila. 
 - Chichester, West Sussex, England ;  Hoboken, NJ :  J. Wiley,  c2004. 
 - xvii, 401 p. :  ill. ;  26 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0470851058 (cloth) 0470851066 (pbk.) 
<br/><br/><label>LCCN: </label>2004004940 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Electronic apparatus and appliances.<br/>Microfabrication.
<br/><br/><label>LC Class. No.: </label>TK7875  / .F73 2004 
<br/><br/><label>Dewey Class. No.: </label>621.3