TY  - BOOK
AU  - Santos, Hector J.De
TI  - Introduction to microelectromechanical microwave systems
SN  - 1-58053-871-1
U1  - 621.3813 SAN 
PY  - 2004///
CY  - BOSTON
PB  - ARTECH HOUSE
KW  - MICROWAVE DEVICES.MEMS
ER  -