Glocker, D. A <br/><br/>
Handbook of thin flim process technology 

 - LONDON  IOP  1995 
 - X7, 3.4 
<br/><br/><label>ISBN: </label>0-7503-0311-5 
<br/><br/><label>Dewey Class. No.: </label>621.38152 HAN'G