TY  - BOOK
AU  - Osiander, Robert, Darrin, M.Ann Garrison, Champion, John L
TI  - Mems and microstructures in aerospace applications
SN  - 0-8247-2637-5
U1  - 629.135 OSI 
PY  - 2006///
CY  - NEW DLEHI
PB  - TAYLOR
KW  - AERONAUTICAL INSTRUMENTS, AEROSPACE ENGINEERING EQUIPMENT ANS SUPPLIES, MICROELECROMECHANICAL SYSTEMS
ER  -