Liu , Chang <br/><br/>
Foundations of mems 

 - NEW JERSEY  PEARSON EDUCATION  2006 
 - XXII,530P 
<br/><br/><label>ISBN: </label>0-13-199204-X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MEMS.MICROELECTROMECHANICAL SYSTEMS,
<br/><br/><label>Dewey Class. No.: </label>621.381 LIU