TY  - BOOK
AU  - Maluf, Nadim Williams, Kirt
TI  - An introduction to microelectromechanical systems engineering:mem mems
SN  - 1-58053-590-9
U1  - 621.381 MAL 
PY  - 2004///
CY  - LONDON
PB  - ARTECH HOUSE
KW  - MICROELECTROMECHANICAL SYSTEMS ELECTROMECHANICAL SYSTEMS.MEM
ER  -