TY  - BOOK
AU  - Glocker, David.A , Shah, Ismat.S
TI  - Handbook of thin film process technology , vol-1
SN  - 0750303115
U1  - 621.38152 HAN 
PY  - 1995///
CY  - LONDON
PB  - INSTITUTE OF PHYSICS
KW  - THIN FILM PROCESS TECHNOLOGY
ER  -