TY  - BOOK
AU  - Martin, Peter.M
TI  - Handbook of deposition technologies for films and coatings , science, applications and technology
SN  - 9780815520313
U1  - 621.38152 MAR 
PY  - 2005///
CY  - USA
PB  - ELSEVIER
KW  - DEPOSITION TECHNOLOGIES FOR FILMS AND COATINGS.THIN FILM
ER  -