TY  - BOOK
AU  - Seshan, Krishna
TI  - Handbook of thin film deposition processes and techniques , principles, methods, equpment and applicaitons
SN  - 0815514425
U1  - 621.38172 HAN 
PY  - 2002///
CY  - NEW YORK
PB  - NOYES PUBLICATIONS
KW  - THIN FILM DEVICES-DESIGN AND CONSTRUCTION
ER  -