TY  - BOOK
AU  - Freund, L.B , Suresh, S
TI  - Thin film materials , stress, defect formation and surface evolution
SN  - 0521822815
U1  - 621.38152 FRE 
PY  - 2003///
CY  - USA
PB  - CAMBRIDGE UNIVERSITY PRESS
KW  - THIN FILM MATERIALS
ER  -