Machlin, E.S <br/><br/>
Materials science in microelectronics , the relationships between thin film processing and structure 

 - BOSTON  ELSEVIER  2005 
<br/><br/><label>ISBN: </label>008044640X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MATERIALS SCIENCE IN MICROELECTRONICS
<br/><br/><label>Dewey Class. No.: </label>621.38152 MAC