Mohamed Gad-El-Hak, Gad-El-Hak , Mohamed <br/><br/>
The mems handbook, mems design and fabrication 

 - NEW YORK  TAYLOR AND FRANCIS  2006 
 - XIX,998P 
<br/><br/><label>ISBN: </label>0-8493-9138-5 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MICROELECTROMECHANICAL SYSTEMS.MICROELECTROMECHANICAL SYSTEMS-DESIGN AND CONSTRUCTION.MICROFABRICATION.
<br/><br/><label>Dewey Class. No.: </label>621.381 MEM