Hsu, Tai Ran <br/><br/>
Mems and microsystems , design and manufacture 

 - NEW DELHI  TATA MCGRAW HILL  2002 
 - XII, 436P 
<br/><br/><label>ISBN: </label>007048709X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MEMS AND MICROSYSTEMS. MICROELECTRONICS.MICROELECTRONIC  PACKAGING ., MICROELECTROMECHANICAL SYSTEMS
<br/><br/><label>Dewey Class. No.: </label>621.381 HSU