Madou, Marc.J <br/><br/>
Fundamentals of microfabricaiton and nanotechnology, solid - state physics, fluidics, and analytical techniques in micro and nanotechnology 

 - 3RD 
 - INDIA  CRC PRESS  2012 
 - VOL-1, XIII,637P 
<br/><br/><label>ISBN: </label>9781420055115 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MICROELECTROMECHANICAL SYSTEMS.NANOELECTROMECHANICAL SYSTEMS.
<br/><br/><label>Dewey Class. No.: </label>620.5 MAD