TAI RAN HSU <br/><br/>
MEMS AND MICROSYSTEMS DESIGN  MANUFACTURE AND NANOSCALE ENGINEERING 

 - 2ND 
 - USA  JOHN WILEY  2008 
 - xxv,550p 
<br/><br/><label>ISBN: </label>978-0-470-08301-7 
<br/><br/><label>Dewey Class. No.: </label>621.381