TY  - BOOK
AU  - May, Gary S:Sze, Simon M
TI  - Fundamentals of semiconductor fabrication
SN  - 9812-53-072-X
U1  - 621.38152 MAY 
PY  - 2004///
CY  - NEW DELHI
PB  - JOHN WILEY & SONS
KW  - SEMICONDUCTOR FABRICATION
ER  -