TY  - BOOK
AU  - Muhammad Ahmad Raza Tahir
ED  - Supervisor Dr. Muhammad Mubasher Saleem
TI  - TH-SOF-1852-Design of Capacitive Micro-Electro-Mechanical-Systems (MEMS) Accelerometer, Considering Residual Stress, Temperature Variations and Thermoelastic Damping
U1  - 200 THE 
PY  - 2021///
CY  - ISLAMABAD
PB  - NUST COLLEGE OF EME
KW  - MS-MTS-18
ER  -