Liu, Chang  <br/><br/>
Foundations of MEMS 

 - 2nd Edition 
 - Upper Saddle River;  Pearson Prentice Hall,   2012. 
<br/><br/><label>ISBN: </label>9780132497367 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Foundations of MEMS
<br/><br/><label>Dewey Class. No.: </label>621.381 LIU