TY  - BOOK
AU  - Liu, Chang 
TI  - Foundations of MEMS
SN  - 9780132497367
U1  - 621.381 LIU 
PY  - 2012///
CY  - Upper Saddle River
PB  - Pearson Prentice Hall, 
KW  - Foundations of MEMS
ER  -