Franssila, Sami. <br/><br/>
Introduction to microfabrication / 
Sami Franssila. 
 - 2nd ed. 
 - Chichester, West Sussex [England] :  John Wiley & Sons,  2010. 
 - xiv, 518 p. :  ill. ;  26 cm. 
<br/><br/> http://www.amazon.com/Introduction-Microfabrication-Sami-Franssila/dp/0470749830/ref=sr_1_1?s=books&ie=UTF8&qid=1405923847&sr=1-1&keywords=9780470749838 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780470749838 
<br/><br/><label>LCCN: </label>2010010076 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.--ME, EL, EE<br/>Electronic apparatus and appliances.<br/>Microfabrication.
<br/><br/><label>LC Class. No.: </label>TK7875  / .F73 2010 
<br/><br/><label>Dewey Class. No.: </label>621.381 FRA