TY  - BOOK
AU  - Franssila,Sami
TI  - Introduction to microfabrication
SN  - 9780470749838
AV  - TK7875 .F73 2010
U1  - 621.381 FRA 
PY  - 2010///
CY  - Chichester, West Sussex [England]
PB  - John Wiley & Sons
KW  - Microelectromechanical systems
KW  - ME, EL, EE
KW  - Electronic apparatus and appliances
KW  - Microfabrication
N1  - http://www.amazon.com/Introduction-Microfabrication-Sami-Franssila/dp/0470749830/ref=sr_1_1?s=books&ie=UTF8&qid=1405923847&sr=1-1&keywords=9780470749838; Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy1201/2010010076-b.html
UR  - http://www.loc.gov/catdir/enhancements/fy1201/2010010076-d.html
UR  - http://www.loc.gov/catdir/enhancements/fy1201/2010010076-t.html
ER  -